Time-of-Flight Secondary Ion Mass Spectrometry for Surface Analysis

Other Titles
표면분석을 위한 비행시간형 이차이온질량분석법 (TOF-SIMS)
Authors
이연희
Issue Date
2003-12
Citation
화학세계, v.12, pp.24 - 29
Keywords
TOF-SIMS; surface analysis; ion gun
URI
https://pubs.kist.re.kr/handle/201004/138017
Appears in Collections:
KIST Article > 2003
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