바이어스 스퍼터링 법으로 제조된 LiCoO2 박막 I. 전기화학적 특성

Other Titles
LiCoO2 Thin Film Deposited by Bias Sputtering Method I. Electrochemical Characteristics
Authors
이영재박호영조병원조원일김광범
Issue Date
2003-11
Publisher
한국전기화학회
Citation
전기화학회지, v.6, no.4, pp.261 - 265
Keywords
LiCoO2; Thin film; Substrate bias; Sputtering; Microbatteries
ISSN
1229-1935
URI
https://pubs.kist.re.kr/handle/201004/138103
Appears in Collections:
KIST Article > 2003
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