DSpace at KISTKIST Article2003

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dc.contributor.author변영태-
dc.contributor.author김형권-
dc.contributor.author김태곤-
dc.date.accessioned2024-01-21T08:07:24Z-
dc.date.available2024-01-21T08:07:24Z-
dc.date.created2022-01-10-
dc.date.issued2003-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/138162-
dc.titleExperimental study of hydrogen-ion implantation for SOI fabrication-
dc.title.alternativeSOI 제작을 위한 수소 이온 주입에 대한 실험적 고찰-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation새물리, v.v. 47, no.no. 4, pp.266 - 272-
dc.citation.title새물리-
dc.citation.volumev. 47-
dc.citation.numberno. 4-
dc.citation.startPage266-
dc.citation.endPage272-
dc.subject.keywordAuthorSmart-cut-
dc.subject.keywordAuthor이온주입-
dc.subject.keywordAuthor실리콘 절연체-
dc.subject.keywordAuthorSOI-
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