Effects of annealing on the residual stress and bending in sputtered thin films of giant magnetostrictive alloys

Title
Effects of annealing on the residual stress and bending in sputtered thin films of giant magnetostrictive alloys
Authors
나석민서수정정종만김희중임상호
Keywords
giant megnetostriction; thin films; residual stress; annealing effects
Issue Date
2001-03
Publisher
Proceedings of the 198th Meeting of the Electrochemical Society
Citation
VOL 2000-29, 521-535
URI
http://pubs.kist.re.kr/handle/201004/13831
Appears in Collections:
KIST Publication > Conference Paper
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