Measurement of sheath expansion in plasma source ion implantation

Title
Measurement of sheath expansion in plasma source ion implantation
Authors
김영우김곤호한승희이연희조정희이수영
Keywords
plasma source ion implantation; Time-dependent sheath; Ion wave; Langmuir probe
Issue Date
2001-02
Publisher
Surface & coatings technology
Citation
VOL 136, NO 1-3, 97-101
URI
http://pubs.kist.re.kr/handle/201004/13834
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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