Electrical properties of metal-oxide-semiconductor structures containing Si nanocrystals fabricated by rapid thermal oxidation process.

Title
Electrical properties of metal-oxide-semiconductor structures containing Si nanocrystals fabricated by rapid thermal oxidation process.
Authors
김용박경화정태훈박홍준이재열최원철김은규
Keywords
급속열처리산화
Issue Date
2001-04
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 10, NO 1, 44-50
URI
http://pubs.kist.re.kr/handle/201004/13837
ISSN
1225-8822
Appears in Collections:
KIST Publication > Article
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