Properties of diamond films deposited by multi-cathode direct current plasma assisted CVD method

Title
Properties of diamond films deposited by multi-cathode direct current plasma assisted CVD method
Authors
이재갑백영준은광용박종완
Keywords
diamond
Issue Date
2001-03
Publisher
Diamond and related materials
Citation
VOL 10, NO 3-7, 552-556
URI
http://pubs.kist.re.kr/handle/201004/13847
ISSN
0925-9635
Appears in Collections:
KIST Publication > Article
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