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Growth of SiC nanorods using Fe and hexamethyldisilabutane

Other Titles

Fe와 hexamethyldisilabutane를 이용한 SiC 나노로드의 성장

Authors

노대호; 김재수; 변동진; 양재웅; 김나리

Issue Date

2003-06

Citation

한국표면공학회지 = J. Kor. Inst. Surf. Eng., v.36, no.3, pp.234 - 241

Keywords

SiC; nanorod; VLS; HMDS; CVD; Fe

URI

https://pubs.kist.re.kr/handle/201004/138490

Appears in Collections:

KIST Article > 2003

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