Effects of excess oxygen on the properties of sputtered RuO₂ thin film supercapacitor

Title
Effects of excess oxygen on the properties of sputtered RuO₂ thin film supercapacitor
Authors
임재홍최두진김한기조원일윤영수
Issue Date
2001-04
Publisher
1st Intelligent Microsystem Symposium
Citation
, 142-145
URI
http://pubs.kist.re.kr/handle/201004/13857
Appears in Collections:
KIST Publication > Conference Paper
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