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A study on the low temperature growth of SiC film with a 1,3-DSB precursor

Other Titles

단일전구체 (1,3-DBS)에 의한 저온 SiC 박막 성장에 관한 연구

Authors

양재웅; 노대호; 윤진국; 김재수

Issue Date

2003-05

Citation

한국표면공학회지 = J. Kor. Inst. Surf. Eng., v.36, no.2, pp.141 - 147

Keywords

SiC; CVD; precursor

URI

https://pubs.kist.re.kr/handle/201004/138594

Appears in Collections:

KIST Article > 2003

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