DSpace at KIST: Experimental study on wet thermal oxides for SOI fabrication

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DC Field	Value	Language
dc.contributor.author	변영태	-
dc.contributor.author	김형권	-
dc.date.accessioned	2024-01-21T09:01:48Z	-
dc.date.available	2024-01-21T09:01:48Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2003-05	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/138602	-
dc.title	Experimental study on wet thermal oxides for SOI fabrication	-
dc.title.alternative	SOI 제작을 위한 습식 열산화막에 대한 실험적 고찰	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	새물리, v.v. 46, no.no. 5, pp.297 - 303	-
dc.citation.title	새물리	-
dc.citation.volume	v. 46	-
dc.citation.number	no. 5	-
dc.citation.startPage	297	-
dc.citation.endPage	303	-
dc.subject.keywordAuthor	실리콘 절연체	-
dc.subject.keywordAuthor	스마트 절단	-
dc.subject.keywordAuthor	산화	-

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