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Friction properties of carbon coated ultra-thin film using Taguchi experimental design

Other Titles

다구찌 실험계획법을 이용한 탄소코팅 초박막의 마찰 특성

Authors

안준양; 김대은; 최진용; 신경호

Issue Date

2003-04

Citation

한국정밀공학회지, v.20, no.4, pp.143 - 150

Keywords

deposition condition; Relative humidity; Taguchi experimental design; Ultra-thin carbon coating film

URI

https://pubs.kist.re.kr/handle/201004/138663

Appears in Collections:

KIST Article > 2003

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