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Investigation of amorphous carbon film deposition by molecular dynamic simulation

Other Titles

분자 동역학 전산모사에 의한 비정질 탄소 필름의 합성거동 연구

Authors

이승협; 이승철; 이규환; 이광렬

Issue Date

2003-03

Citation

한국진공학회지, v.v. 12, no.no. 1, pp.25 - 34

Keywords

다이아몬드상 카본

URI

https://pubs.kist.re.kr/handle/201004/138759

Appears in Collections:

KIST Article > 2003

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