The oxidation of Kovar in Humidified N₂/H₂ atmosphere

Title
The oxidation of Kovar in Humidified N₂/H₂ atmosphere
Authors
김병수김민호김상우최덕균손용배
Keywords
Kovar; glass-to-metal sealing; oxidation layer
Issue Date
2001-04
Publisher
마이크로전자 및 패키징학회지; Journal of Microelectronics and Packaging Society
Citation
VOL 8, NO 2, 1-7
URI
http://pubs.kist.re.kr/handle/201004/13876
ISSN
1226-9360
Appears in Collections:
KIST Publication > Article
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