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dc.contributor.author문성욱-
dc.date.accessioned2024-01-21T09:10:58Z-
dc.date.available2024-01-21T09:10:58Z-
dc.date.created2022-01-10-
dc.date.issued2003-03-
dc.identifier.issn1227-741X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/138761-
dc.titleEU의 마이크로 / 나노 기술 동향-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation월간 반도체, v.v. 3, pp.34 - 50-
dc.citation.title월간 반도체-
dc.citation.volumev. 3-
dc.citation.startPage34-
dc.citation.endPage50-
dc.subject.keywordAuthor마이크로-
dc.subject.keywordAuthor나노 기술-
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