KIST Library Institutional Repository

Microstructure control of tungsten film for bragg reflectors of thin film bulk acoustic wave resonators.

Other Titles

체적탄성파 공진기 브라그 반사층 적용을 위한 텅스텐 박막의 미세구조 조절에 대한 연구 =

Authors

강성철; 이시형; 박종완; 이전국

Issue Date

2003-03

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.v. 40, no.no. 3, pp.268 - 272.

Keywords

Tungsten

URI

https://pubs.kist.re.kr/handle/201004/138775

Appears in Collections:

KIST Article > 2003

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML