DSpace at KISTKIST Article2003

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dc.contributor.author임건자-
dc.contributor.author김태은-
dc.contributor.author이종호-
dc.contributor.author김주선-
dc.contributor.author이해원-
dc.contributor.author현상훈-
dc.date.accessioned2024-01-21T09:15:26Z-
dc.date.available2024-01-21T09:15:26Z-
dc.date.created2022-01-10-
dc.date.issued2003-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/138844-
dc.titleEffects of synthetic temperature and suspension stability of CeO₂abrasive on CMP characteristics-
dc.title.alternativeCeO₂연마입자의 합성온도와 수계안정성이 CMP 특성에 미치는 영향-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationJournal of the Korean Ceramic Society, v.40, no.2, pp.167 - 171-
dc.citation.titleJournal of the Korean Ceramic Society-
dc.citation.volume40-
dc.citation.number2-
dc.citation.startPage167-
dc.citation.endPage171-
dc.subject.keywordAuthorCeO₂-
dc.subject.keywordAuthorchemical mechanical planarization-
dc.subject.keywordAuthorsynthetic temperature-
dc.subject.keywordAuthorsuspension stability-
dc.subject.keywordAuthorpH-
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KIST Article > 2003
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