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dc.contributor.author문성욱-
dc.date.accessioned2024-01-21T09:31:07Z-
dc.date.available2024-01-21T09:31:07Z-
dc.date.created2022-01-10-
dc.date.issued2003-02-
dc.identifier.issn1227-741X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/138864-
dc.title독일 및 프랑스의 마이크로/나노 기술 동향-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation월간 반도체, v.2, pp.50 - 62-
dc.citation.title월간 반도체-
dc.citation.volume2-
dc.citation.startPage50-
dc.citation.endPage62-
dc.subject.keywordAuthor마이크로-
dc.subject.keywordAuthor나노기술-
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KIST Article > 2003
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