Correlation between surface modification of HSQ films and phase transformation of Cu/W-N bilayers deposition on the NH3 plasma treated HSQ films

Title
Correlation between surface modification of HSQ films and phase transformation of Cu/W-N bilayers deposition on the NH3 plasma treated HSQ films
Authors
김동준심현상박종완김용태김성일김춘근
Keywords
HSQ
Issue Date
2001-04
Publisher
Material Research Society (MRS) 2001 spring Meeting
Citation
, 231.-231.
URI
http://pubs.kist.re.kr/handle/201004/13889
Appears in Collections:
KIST Publication > Conference Paper
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