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The use of an electron cyclotron resonance plasma to fabrication a photovoltaic HgCdTe diode for MWIR detection

Other Titles

Electron cyclotron resonance (ECR) plasma를 이용한 중적외선감지용 광전압형 HgCdTe 소자 제작

Authors

안세영; 이상훈; 서상희; 김진상

Issue Date

2003-01

Citation

새물리, v.v. 46, no.1, pp.47 - 51

Keywords

ECR

URI

https://pubs.kist.re.kr/handle/201004/138927

Appears in Collections:

KIST Article > 2003

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