Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 문성욱 | - |
| dc.contributor.author | 허재성 | - |
| dc.date.accessioned | 2024-01-21T09:42:31Z | - |
| dc.date.available | 2024-01-21T09:42:31Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 2002-11 | - |
| dc.identifier.issn | 1227-741X | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/139063 | - |
| dc.title | Optical MEMS-MEMS 기술의 액츄에이터 응용 (III) | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 월간 반도체, v.11, pp.41 - 52 | - |
| dc.citation.title | 월간 반도체 | - |
| dc.citation.volume | 11 | - |
| dc.citation.startPage | 41 | - |
| dc.citation.endPage | 52 | - |
| dc.subject.keywordAuthor | MEMS | - |
| dc.subject.keywordAuthor | 액츄에이터 | - |
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- KIST Article > 2002
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