Effect of RF sputtering power in Lipon solid electrolyte ionic conductivity for thin film lithium rechargeable microbatteries

Title
Effect of RF sputtering power in Lipon solid electrolyte ionic conductivity for thin film lithium rechargeable microbatteries
Authors
최창훈박호영남상철윤영수조원일조병원윤경석탁용석
Keywords
lithium phosphorous Oxy Nitride(lipon); thin film battery
Issue Date
2001-04
Publisher
한국전기화학회 학술발표회 초록집
URI
http://pubs.kist.re.kr/handle/201004/13913
Appears in Collections:
KIST Publication > Conference Paper
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