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Effects of leveler on the trench filling during damascene copper plating

Other Titles

전해전착시 상감 구리 배선의 충전에 미치는 레벨러의 효과

Authors

이유용; 박영준; 이재봉; 조병원

Issue Date

2002-08

Citation

Journal of the Korean Electrochemical Society = 전기화학회지, v.5, no.3, pp.153 - 158

Keywords

electroplating; leveler; damascene; void; superfilling

ISSN

1229-1935

URI

https://pubs.kist.re.kr/handle/201004/139314

Appears in Collections:

KIST Article > 2002

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