Effect of deposition temperature on the etched feature of thin chromium film and their application to field emitter arrays(FEAs)

Title
Effect of deposition temperature on the etched feature of thin chromium film and their application to field emitter arrays(FEAs)
Authors
Hoon KimJong-Won Park주병권이윤희오명환Jin Jang
Keywords
FEAs
Issue Date
2001-06
Publisher
SID 2001
Citation
, 714-717
URI
http://pubs.kist.re.kr/handle/201004/13956
Appears in Collections:
KIST Publication > Conference Paper
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