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Studies on Formation of the Floating Membrane using SOI Wafer and Application to Fabrication of Thermopile Sensor

Other Titles

SOI 웨이퍼를 이용한 Floating Membrane 구조 형성 및 Thermopile센서 제작에의 응용

Authors

이성준; 주병권; 이윤희; 서상희; 오명환; 김태윤; 김철주

Issue Date

2001-11

Publisher

한국물리학회

Citation

새물리, v.43, pp.S18 - S22

ISSN

0374-4914

URI

https://pubs.kist.re.kr/handle/201004/140048

Appears in Collections:

KIST Article > 2001

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