Fabrication of Al/PZT/RuO2 micro cantilever system and computer simulation of resonant characteristics

Title
Fabrication of Al/PZT/RuO2 micro cantilever system and computer simulation of resonant characteristics
Authors
유웅현정용재홍경일최덕균김태송
Keywords
micro cantilever
Issue Date
2001-07
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
VOL 38, NO 7, 634-638
URI
http://pubs.kist.re.kr/handle/201004/14011
ISSN
1229-7801
Appears in Collections:
KIST Publication > Article
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