KIST Library Institutional Repository

증착조건에 따른 극미세 다이아몬드상 카본 박막의 탄성률 변화거동

Other Titles

A variation of elastic modulus of very thin diamond-like carbon films with deposition condition

Authors

정진원; 이광렬; 은광용; 고대홍

Issue Date

2001-08

Publisher

한국진공학회

Citation

한국진공학회지, v.10, no.4, pp.387 - 395

Keywords

다이아몬드상 카본; 탄성률측정; 기계적 특성; 박막의 구조

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/140256

Appears in Collections:

KIST Article > 2001

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML