DSpace at KIST: Preparation of AIN thin film with new type of single precursor

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DC Field	Value	Language
dc.contributor.author	안창규	-
dc.contributor.author	최승철	-
dc.contributor.author	한성환	-
dc.date.accessioned	2024-01-21T12:03:41Z	-
dc.date.available	2024-01-21T12:03:41Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2001-08	-
dc.identifier.issn	1229-7801	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/140268	-
dc.publisher	한국세라믹학회	-
dc.title	Preparation of AIN thin film with new type of single precursor	-
dc.title.alternative	새로운 단일 전구체를 이용한 AIN 박막의 제조	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국세라믹학회지 = Journal of the Korean Ceramic Society, v.38, no.8, pp.761 - 764.	-
dc.citation.title	한국세라믹학회지 = Journal of the Korean Ceramic Society	-
dc.citation.volume	38	-
dc.citation.number	8	-
dc.citation.startPage	761	-
dc.citation.endPage	764.	-
dc.description.journalRegisteredClass	kci	-
dc.subject.keywordAuthor	MOCVD	-

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