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Effects of applied bias conditions on electrochemical etch-stop characteristics

Other Titles

인가 바이어스 조건이 전기화학적 식각정지 특성에 미치는 영향

Authors

정귀상; 강경두; 김태송; 이원재; 송재성

Issue Date

2001-07

Publisher

한국전기전자재료학회

Citation

TEEM (한국전기전자재료학회), v.14, no.4, pp.263 - 268

Keywords

SOI

ISSN

1229-7607

URI

https://pubs.kist.re.kr/handle/201004/140337

Appears in Collections:

KIST Article > 2001

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