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The oxidation of Kovar in Humidified N₂/H₂ atmosphere

Other Titles

가습된 N₂/H₂ 혼합가스 분위기에서의 Kovar 산화 거동

Authors

김병수; 김민호; 김상우; 최덕균; 손용배

Issue Date

2001-04

Publisher

한국마이크로전자 및 패키징학회

Citation

마이크로전자 및 패키징학회지 = Journal of Microelectronics and Packaging Society, v.8, no.2, pp.1 - 7

Keywords

Kovar; glass-to-metal sealing; oxidation layer

ISSN

1226-9360

URI

https://pubs.kist.re.kr/handle/201004/140575

Appears in Collections:

KIST Article > 2001

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