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Investigation of the performance characteristics of an in-situ particle monitor at low pressures using aerodynamic lenses

Other Titles

저압상태에서 공기역학적 렌즈를 이용한 in-situ particle monitor의 성능특성 분석

Authors

배귀남

Issue Date

2000-10

Publisher

대한기계학회

Citation

대한기계학회논문집B = Transactions of the Korean Society of Mechanical Engineers B, v.24, no.10, pp.1359 - 1367

Keywords

in-situ particle monitor; particle beam; aerodynamic lens; low pressure; detection efficiency; 실시간 입자측정기; 입자 빔; 공기역학적 렌즈; 저압; 측정효율

ISSN

1226-4881

URI

https://pubs.kist.re.kr/handle/201004/141042

Appears in Collections:

KIST Article > 2000

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