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Development of ultra-clean aligning/mounting process of FED spacers using electrostatic bonding

Other Titles

정전 열 접합을 이용한 FED 스페이서의 초청정 정렬/탑재 공정 개발

Authors

주병권; 강문식; 이윤희

Issue Date

2000-10

Publisher

대한전기학회

Citation

전기학회논문지 C = Transactions of the Korean Institute of Electrical Engneers, v.49C, no.11, pp.635 - 639

Keywords

FED spacer; spacer alignment; spacer bonding; electrostatic bonding

ISSN

1229-246X

URI

https://pubs.kist.re.kr/handle/201004/141043

Appears in Collections:

KIST Article > 2000

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