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Study of the fabrication of a thermal isolation structure for a microbolometer

Other Titles

마이크로 볼로미터의 열적 고립구조 제작에 관한 연구

Authors

강호관; 김민철; 하원호; 문성욱; 오명환; 김도훈

Issue Date

2000-10

Publisher

한국물리학회

Citation

새물리, v.41, no.4, pp.243 - 248

Keywords

microbolometer; thermal isolation

ISSN

0374-4914

URI

https://pubs.kist.re.kr/handle/201004/141054

Appears in Collections:

KIST Article > 2000

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