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A study on C-axis preferred orientation of ZnO thin film at Ar/O2 gas ratios

Other Titles

Ar/O2에 따른 ZnO 박막의 C-축 배향성에 관한 연구

Authors

이동윤; 박용욱; 남산; 이전국; 김현재; 윤석진; 황금찬

Issue Date

2000-07

Publisher

한국전기전자재료학회

Citation

전기전자재료학회논문지, v.13, no.7, pp.617 - 624

Keywords

ZnO thin film; RF magnetron sputtering; preferred orientation; resistivity; roughness; ZnO 박막; 고주파 마그네트론 스퍼터링; 우선 배향성; 비저항; 거칠기

ISSN

1226-7945

URI

https://pubs.kist.re.kr/handle/201004/141247

Appears in Collections:

KIST Article > 2000

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