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dc.contributor.author변영태-
dc.contributor.author우덕하-
dc.contributor.author김선호-
dc.contributor.author정영철-
dc.contributor.author구본조-
dc.contributor.author신기철-
dc.date.accessioned2024-01-21T13:43:07Z-
dc.date.available2024-01-21T13:43:07Z-
dc.date.created2022-01-10-
dc.date.issued2000-07-
dc.identifier.issn0374-4914-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/141253-
dc.publisher한국물리학회-
dc.titleDeeply etched InP/InGaAsP/InP Ridge-type waveguides fabricated by using chemically assisted ion beam etching (CAIBE)-
dc.title.alternativeCaibe 기법으로 제작된 깊게 식각된 InP/InGaAsP/InP Ridge 형태의 광도파로-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation새물리, v.41, no.1, pp.41 - 47-
dc.citation.title새물리-
dc.citation.volume41-
dc.citation.number1-
dc.citation.startPage41-
dc.citation.endPage47-
dc.subject.keywordAuthorInP/InGaAs/InP 광도파로-
dc.subject.keywordAuthorCAIBE 식각기법-
dc.subject.keywordAuthor직선 도파로-
dc.subject.keywordAuthor곡선도파로-
dc.subject.keywordAuthor삽입손실-
dc.subject.keywordAuthor복사손실-
dc.subject.keywordAuthor전파손실-
dc.subject.keywordAuthor반사손실-
dc.subject.keywordAuthor2D-FEM-
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