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반응성 r.f. 스퍼터링에 의한 마이크로 박막 전지용 산화바나듐 박막의 제작 및 전기화학적 특성 평가

Other Titles

Fabrication and electrochemical characterization of amorphous vanadium oxide thin films for thin film micro-battery by reactive r.f. sputtering

Authors

전은정; 신영화; 남상철; 윤영수; 조원일

Issue Date

2000-02

Publisher

한국진공학회

Citation

한국진공학회지, v.9, no.1, pp.42 - 47

Keywords

amorphous vanadium oxide

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/141593

Appears in Collections:

KIST Article > 2000

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