Characterization of resonant behavior and sensitivity using micromachined PZT cantilever

Title
Characterization of resonant behavior and sensitivity using micromachined PZT cantilever
Authors
이정훈윤기현김태송
Keywords
piezoelectric; MEMS; cantilever; PZT; electromechanical; sensitivity
Issue Date
2002-11
Publisher
Integrated Ferroelectrics
Citation
VOL 50, 43-52
URI
http://pubs.kist.re.kr/handle/201004/14166
ISSN
1058-4587
Appears in Collections:
KIST Publication > Article
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