Structural and electrical characteristics of ZrO ₂ as a gate dielectric and buffer layer grown by RF magnetron sputtering

Title
Structural and electrical characteristics of ZrO ₂ as a gate dielectric and buffer layer grown by RF magnetron sputtering
Authors
임근식최훈상이종한김용태김성일최인훈
Issue Date
2002-11
Publisher
AVS 49th International Symposium, Colorado Convention Center Denver
URI
http://pubs.kist.re.kr/handle/201004/14187
Appears in Collections:
KIST Publication > Conference Paper
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