Luminescence from the thermally treated cerium oxide on silicon

Abstract

As an efficient ultra violet/blue (UVB) luminescent material compatible with Si-based optoelectronics, we introduce thermally treated cerium oxide (CeOx) on silicon. UVB luminescence ranging from 358 nm to 450 nm is observed at room temperature for thermally treated CeOx thin films. The luminescence is attributed to Ce-4.667(SiO4)(3)O and Ce2Si2O7 generated during thermal treatment.