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질소 이온주입법에 의한 BN 박막의 계면구조 개선 및 밀착력 향상

Other Titles

Modification and adhesion improvement of BN interfacial layers by post-N**+ implantation

Authors

변응선; 이성훈; 이상로; 이구현; 한승희; 이응직; 윤재홍

Issue Date

1999-05

Publisher

한국진공학회

Citation

한국진공학회지, v.8, no.2, pp.158 - 164

Keywords

c-BN

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/142204

Appears in Collections:

KIST Article > Others

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