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Influences of plasma treatment on the electrical characteristics of rf-magnetron sputtered BaTa2O6 thin films

Other Titles

플라즈마 표면 처리가 BaTa2O6 박막의 전기적 특성에 미치는 효과에 관한 연구

Authors

김영식; 이윤희; 주병권; 성만영; 오명환

Issue Date

1999-05

Publisher

대한전기학회

Citation

대한전기학회논문지 : 전기물성,응용부문 C = The Transactions of The Korean Institute of Electrical Engineers, v.48C, no.5, pp.319 - 325

Keywords

FED; BaTa2O6 thin films; ACTFELD; Oxygen Plasma treatment; High dielectric donstant

URI

https://pubs.kist.re.kr/handle/201004/142207

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KIST Article > Others

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