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Metal(Ti, Nb) coating and silicidization of Si-tip for field emitter applications

Other Titles

전계 방출 소자용 실리콘 팁에 대한 금속 박막 (Ti, Nb) 코팅 및 실리사이드화

Authors

주병권; 박재석; 윤재형; 김경욱; 강문식; 백경갑; 장진; 차균현; 오명환

Issue Date

1999-04

Publisher

한국전기전자재료학회

Citation

전기전자재료학회논문지, v.12, no.4, pp.291 - 297

Keywords

Si-tip array; Ti and Nb coating; silicidization; field emission performance; 실리콘 팁; 티타늄 및 니오비움 코팅; 실리사이드화; 전계 방출 성능

ISSN

1226-7945

URI

https://pubs.kist.re.kr/handle/201004/142297

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KIST Article > Others

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