HARS(high aspect ratio structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus

Title
HARS(high aspect ratio structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus
Authors
박종연Kuntae Kim김진석한용희문성욱박정호
Keywords
MRPBI
Issue Date
2002-02
Publisher
한국반도체학술대회 논문집
Citation
, 715-716
URI
http://pubs.kist.re.kr/handle/201004/14233
Appears in Collections:
KIST Publication > Conference Paper
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