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이온빔보조증착법으로 합성한 hexagonal BN막의 hexagonal ring의 배열과 결정성

Other Titles

Alignment and lattice quality of hexagonal rings of hexagonal BN films synthesized by ion beam assisted deposition

Authors

박영준; 한준희; 이정용; 백영준

Issue Date

1999-02

Publisher

한국진공학회

Citation

한국진공학회지, v.8, no.1, pp.43 - 50

Keywords

hBN; iBAD

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/142411

Appears in Collections:

KIST Article > Others

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