Hydrophobic self-assembled monolayer(SAM) coating for enhanced demolding performance in micromolding

Title
Hydrophobic self-assembled monolayer(SAM) coating for enhanced demolding performance in micromolding
Authors
박상하한승오박종연문성욱박정호
Keywords
MEMS; micromolding; adhesion force; XPS; AFM
Issue Date
2002-04
Publisher
전기학회논문지 C; Transactions of the Korean Institute of Electrical Engneers
Citation
VOL 51, NO 4, 175-183
URI
http://pubs.kist.re.kr/handle/201004/14252
ISSN
1229-246X
Appears in Collections:
KIST Publication > Article
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