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dc.contributor.author주병권-
dc.contributor.author오명환-
dc.date.accessioned2024-01-21T16:15:06Z-
dc.date.available2024-01-21T16:15:06Z-
dc.date.created2022-01-10-
dc.date.issued1998-12-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142669-
dc.title기판 접합 공정 및 이를 이용한 MEMS/FED Packaging 기술동향 .-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전기학회지 = Proceedings of KIEE, v.v. 47, no.no. 12, pp.21 - 29-
dc.citation.title전기학회지 = Proceedings of KIEE-
dc.citation.volumev. 47-
dc.citation.numberno. 12-
dc.citation.startPage21-
dc.citation.endPage29-
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