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Characteristics of ZnO/Glass thin films prepared by RF magnetron sputtering

Other Titles

RF 마그네트론 반응성 스퍼터링으로 제작된 ZnO/Glass 박막 특성

Authors

박용욱; 윤석진; 최지원; 김현재; 정형진; 박창엽

Issue Date

1998-10

Publisher

한국전기전자재료학회

Citation

TEEM (한국전기전자재료학회), v.11, no.10, pp.833 - 841

Keywords

ZnO thin film

ISSN

1229-7607

URI

https://pubs.kist.re.kr/handle/201004/142823

Appears in Collections:

KIST Article > Others

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