KIST Library Institutional Repository

Effects of Cl/H input ratio on the chemical vapor deposition rate of silicon on molybdenum substrate

Other Titles

Mo 기판위에서 Si의 화학증착속도에 미치는 Cl/H 주입비의 영향

Authors

윤진국; 윤호상; 김희수; 백영현; 김재수

Issue Date

1998-09

Publisher

대한금속학회

Citation

대한금속학회지, v.36, no.9, pp.1461 - 1469

Keywords

kinetics

URI

https://pubs.kist.re.kr/handle/201004/142863

Appears in Collections:

KIST Article > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML