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The sensitivity of ultra thin pd-doped SnO2 gas sensor fabricated by ion-assisted deposition for methane gas

Other Titles

이온빔 보조증착법을 이용하여 제작된 SnO2 에 초박막 Pd가 첨가된 박막형 가스센서의 메탄가스 감지 특성

Authors

조정; 조준식; 윤기현; 김현주; 최원국; 정형진; 고석근

Issue Date

1998-08

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.35, no.8, pp.795 - 800

Keywords

SnO2 thin film; reactive ion-assisted deposition; ultra-thin Pd layer; Ion beam sputtering; spill-over

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/142918

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KIST Article > Others

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