DSpace at KIST: Deposition of piezoelectric PZT(53/47) film by metalorganic decomposition for microelectromechanical device

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DC Field	Value	Language
dc.contributor.author	윤영수	-
dc.contributor.author	정형진	-
dc.contributor.author	신영화	-
dc.date.accessioned	2024-01-21T17:04:00Z	-
dc.date.available	2024-01-21T17:04:00Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1998-06	-
dc.identifier.issn	1226-7945	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/143029	-
dc.publisher	한국전기전자재료학회	-
dc.title	Deposition of piezoelectric PZT(53/47) film by metalorganic decomposition for microelectromechanical device	-
dc.title.alternative	Microelectromechanical system 소자 제작을 위한 유기 금속분해법에 의한 압전성 PZT(53/47) 박막의 증착	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	전기전자재료학회논문지 (Journal of KIEEME), v.11, no.6, pp.458 - 464	-
dc.citation.title	전기전자재료학회논문지 (Journal of KIEEME)	-
dc.citation.volume	11	-
dc.citation.number	6	-
dc.citation.startPage	458	-
dc.citation.endPage	464	-
dc.subject.keywordAuthor	유기금속분해법	-

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